Interdiffusion in amorphous Si/Ge multilayers by Auger depth profiling technique
نویسندگان
چکیده
منابع مشابه
Glow Discharge Depth Profiling a Powerful Analytical Technique in Surface Engineering (TECHNICAL NOTE)
A variety of analytical techniques have been developed and employed to characterize the surfaces, subsurfaces and interfaces of surface engineering systems. They provide important information for quality control, process optimization and further development. Since the mid 1980's, glow discharge spectrometry (GDS) has emerged as an important and versatile technique for rapid depth profiling anal...
متن کاملMagnetic Depth Profiling Co/Cu Multilayers to Investigate Magnetoresistance
The magnetic microstructure responsible for the metastable high resistance state of weakly coupled, as-prepared [Co(6nm)/Cu(6nm)]20 multilayers was analyzed using polarized neutron reflectivity (PNR) and scanning electron microscopy with polarization analysis (SEMPA). This paper focuses and expands on the SEMPA measurements. In multilayer structures such as these, SEMPA can be combined with ion...
متن کاملDepth-profiling X-ray photoelectron spectroscopy (XPS) analysis of interlayer diffusion in polyelectrolyte multilayers.
Functional organic thin films often demand precise control over the nanometer-level structure. Interlayer diffusion of materials may destroy this precise structure; therefore, a better understanding of when interlayer diffusion occurs and how to control it is needed. X-ray photoelectron spectroscopy paired with C60(+) cluster ion sputtering enables high-resolution analysis of the atomic composi...
متن کاملDiffuse X-ray scattering of amorphous multilayers
We present a new method to measure the difuse scattering of amorphous multilayers. In contrast to conventional scans, that all take place in the plane of reflection, in this out-of-plane scattering geometry the accessible range in parallel momentum transfer Qi is not limited by the sample surface. We can therefore record data continuously from
متن کاملHyperfine Interactions of Fe Nuclei in the Study of Interdiffusion Phenomena and Phase Formation*
The effects of interdiffusion phenomena and reactions occurring in the early stages of the interaction at 1273 K between iron and chromium monoborides were studied by transmission Mössbauer and X-ray diffraction techniques, and modifications occurring in Fe/Al multilayers during both deposition and subsequent thermal aging at 400 K in vacuum or air were studied by conversion electron Mössbauer ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2001
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1331330